Problem solved!
For years, the fundamental issue of maintaining lifetime
vacuum in the reference chamber of a micro sensor reminded a huge
challenge. In the mid-nineties, Sensonor introduced an anodic wafer
bonding technology with electrical crossings buried under an
epitaxial layer. This solution secures both the hermetic reference
chamber and as well provides a stable inert environment for the
sensing system being piezo resistors or capacitive
electrodes.
Less than 0.1ppm failure rate for several 100 million
sensors tells the rest of the story. These unique solutions are now
made available for general applications in the ranges 0.5 to 20
bars.
Small and robust
A range of small and robust precision gyros based on the
balanced ButterflyGyroTM design is offered. The
ButterflyGyroTM design guarantees unbeaten performance
for demanding applications and for vibration exposed applications
in particular.
Pioneering MEMS gyros
From pioneering Silicon Gyros for automotive use,
we have further developed high precision MEMS based alternatives to
traditional gyro technology.
Wide range of performance
The performance spans from the SAR series gyro sensors,
closing the gap between low grade FOG's and traditional MEMS gyros,
to the STIM series gyro modules, representing a superior choice to
FOG's in respect to robustness, reliability, size/weight, power and
cost.
Enabling solutions
Sensonor makes a difference in the industrial sensor and
transducer community by focusing on products based on MEMS
technology for High Precision applications.
Our devotion is to serve customers with enabling solutions when
the combination of size, performance and robustness matter. We
offer products that can replace existing non efficient
technology.
Outstanding reliability
Sensonor has for more than 25 years played a significant role in
the global MEMS industry. Over the years, more than 250 million
pressure sensors, more than 250 million accelerometers, and more
than 2 million gyros have been shipped to customers for use in
numerous type of applications. Less than 0.1ppm field failures are
the ultimate proof of long term dedication and capability.