When size, performance and robustness matter!
High precision MEMS sensors since 1965

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Problem solved!
For years, the fundamental issue of maintaining lifetime vacuum in the reference chamber of a micro sensor reminded a huge challenge. In the mid-nineties, Sensonor introduced an anodic wafer bonding technology with electrical crossings buried under an epitaxial layer. This solution secures both the hermetic reference chamber and as well provides a stable inert environment for the sensing system being piezo resistors or capacitive electrodes.
Less than 0.1ppm failure rate for several 100 million sensors tells the rest of the story. These unique solutions are now made available for general applications in the ranges 0.5 to 20 bars.

Pressure sensing into a new dimension
Innovations like embedded microcontroller, LF wireless interface for configuration and actuation, and on-chip accelerometer give the user undreamed possibilities compared to traditional pressure sensors.

Small and robust
A range of small and robust precision gyros based on the balanced ButterflyGyroTM design is offered. The ButterflyGyroTM design guarantees unbeaten performance for demanding applications and for vibration exposed applications in particular.

Pioneering MEMS gyros
From pioneering Silicon Gyros for automotive use, like the SAR10, we have further developed high precision MEMS based alternatives to traditional gyro technology.

Wide range of performance
The performance spans from the SAR100 class, closing the gap between low grade FOG's and traditional MEMS gyros, to the SIMU202 class, representing a superior choice to FOG's in respect to robustness, reliability, size/weight, power and cost.

Enabling solutions
Sensonor Technologies makes a difference in the industrial sensor and transducer community by focusing on products based on MEMS technology, but for High Precision applications.
Our devotion is to serve customers with enabling solutions when the combination of size, performance and robustness matter. We offer products that can replace existing non efficient technology.

Outstanding reliability
Sensonor has for 25 years played a significant role in the global MEMS industry. Over the years, more than 200 million pressure sensors, more than 200 million accelerometers, and more than 2 million gyros have been shipped to customers for use in numerous type of applications. Less than 0.1ppm field failures are the ultimate proof of long term dedication and capability.

Check out!

SAR100_cluster

SAR100

High Precision Gyro Sensor closing the gap between FOG's and MEMS gyros. The ButterflyGyroTM design guarantees unbeaten performance for demanding applications. Check out the unique package accommodating both horizontal and vertical mounting.
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News

S.E.E. 2010

logo S.E.E.April 13-15, 2010 in Stockholm, Sweden. Meet us at stand C02:61.
S.E.E.2010...

 

 

Sensonor launches a multipurpose pressure sensor

24.02.2010 - Sensonor Technologies AS a multipurpose digital absolute pressure sensor - fully calibrated and compensated with programmable, embedded RISC µC and optional accelerometer
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Sensonor profiled in South China Morning Post

05.02.2010 - South China Morning Post is profiling Sensonor Technologies in their special report, Norway Country Report, under the headline "Sensonor shifts to high-end applications".

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