Problem solved!
For years, the fundamental issue of maintaining lifetime
vacuum in the reference chamber of a micro sensor reminded a huge
challenge. In the mid-nineties, Sensonor introduced an anodic wafer
bonding technology with electrical crossings buried under an
epitaxial layer. This solution secures both the hermetic reference
chamber and as well provides a stable inert environment for the
sensing system being piezo resistors or capacitive
electrodes.
Less than 0.1ppm failure rate for several 100 million sensors tells
the rest of the story. These unique solutions are now made
available for general applications in the ranges 0.5 to 20
bars.
Pressure sensing into a new dimension
Innovations like embedded microcontroller, LF wireless interface
for configuration and actuation, and on-chip accelerometer give the
user undreamed possibilities compared to traditional pressure
sensors.
Small and robust
A range of small and robust precision gyros based on the
balanced ButterflyGyroTM design is offered. The
ButterflyGyroTM design guarantees unbeaten performance
for demanding applications and for vibration exposed applications
in particular.
Pioneering MEMS gyros
From pioneering Silicon Gyros for automotive use, like the
SAR10, we have further developed high precision MEMS based
alternatives to traditional gyro technology.
Wide range of performance
The performance spans from the SAR100 class, closing the
gap between low grade FOG's and traditional MEMS gyros, to the
STIM202 class, representing a superior choice to FOG's in respect
to robustness, reliability, size/weight, power and cost.
Enabling solutions
Sensonor Technologies makes a difference in the industrial
sensor and transducer community by focusing on products based on
MEMS technology, but for High Precision applications.
Our devotion is to serve customers with enabling solutions when the
combination of size, performance and robustness matter. We offer
products that can replace existing non efficient technology.
Outstanding reliability
Sensonor has for 25 years played a significant role in the global
MEMS industry. Over the years, more than 200 million pressure
sensors, more than 200 million accelerometers, and more than 2
million gyros have been shipped to customers for use in numerous
type of applications. Less than 0.1ppm field failures are the
ultimate proof of long term dedication and capability.