• Pressure sensors

    Sensonor offer a range of small and robust absolute pressure sensor dies. The product range utilizes Sensonor's anodic wafer bonding technology with electrical crossings buried under an epitaxial layer. This guarantees unbeaten performance for demanding applications requiring high life time stability and high media compatibility. The reliability is proven with less than 0.1ppm failure rate for more than 200 million sensors shipped for automotive and industrial applications.

    The sensor dies are offered in wafer packs, as single wafers and wafer lots. Sensonor pressure dies are ideal building blocks for OEM customer. The SW412 sensor die includes an on-chip accelerometer.

Key features

  • Superior reliability and robustness over long lifetime
  • Excellent media compatibility in harsh environments
  • High overload capability in tough applications
  • Superior long term stability
  • Integrated accelerometer

Typical application areas

  • Absolute, Barometric and Gage pressure sensing

    Absolute Pressure Sensors and Vacuum Pressure Sensors: The reference for absolute pressure sensors is vacuum contained in a cavity and the output is zero at vacuum. All Sensonor's sensors are absolute by design. Low range absolute pressure sensors can be used with good result for vacuum measurements in the "low vacuum" domain (absolute pressure larger than 30mbar).


    Barometric Pressure Sensors: These are absolute pressure sensors with a limited range. Sensonor specifies the barometric range from 0.80 to 1.20 bar. A limited range offers more resolution and accuracy.


    Gage pressure sensors: With gage sensors, pressure readings are referenced to the atmosphere and the output is zero at atmospheric pressure. Since all Sensonor's pressure sensors are absolute by design they will not measure gage pressure very accurately; however, for higher pressure ranges the inaccuracy in the measurement may be insignificant even using an absolute sensor after correction for nominal atmospheric pressure.

  • Pressure sensors used for indirect assessment of other quantities

    Due to the easy and fundamental aspect of pressure sensing, it is often found as the method to assess quite different quantities. Examples are use for weight and force measurement through the relation Force(F) = Pressure(p) x Area(A) and for flow measurements using the Venturi effect.

  • Aerospace

    All planes and helicopters need many pressure sensors. The use of MEMS precision technology can make such systems cheaper, smaller, lighter and more reliable. Examples of use are in Altimeters, Air Data Computers (ADS and ADAHRS), in aircraft cabin and environmental control systems, in hydraulic systems and in engine control systems.

  • Automotive

    Modern cars can include more than 100 sensors and many of these use MEMS technology. For some applications unique properties in relation to robustness and environmental capability may be required. Examples can be found within engine control, including manifold and barometric pressure, within level metering, within water and climate control, within fuel line control, within brake controls, within gear box control, within passenger detection and weight distribution and for tire pressure monitoring.

  • Domestic and house appliances

    The home is becoming an electronic control room. Every appliance, environmental and utility function in the professional building or the private home includes one or more control functions. Pressure sensors are needed for measurements of gases/air or liquids/water. Examples are: Air conditioning, water metering, gas metering, vacuum cleaners, dishwashers, washing machines, sewage and waste water.

  • Medical and biomedical equipment

    Among applications for pressure sensors used in medicine and for health monitoring is blood pressure measurement, abdominal pressure measurement and plantar pressure (foot pressure). Pressure sensors are also often used in medical equipment based on hydraulic controls and for indirect weight and flow measurements.

  • Leisure and sports

    Electronics have for long been introduced into every sector of leisure and sports equipment. Examples are altimeters often included with arm wrist watches, dept meters for scuba diving, pulse meters for training monitors and for wrist mount and indirect use as force detectors, used in switches on training equipment and for foot pressure measurement.

  • Meteorology and environmental monitoring

    The forecasting and monitoring of weather and environmental conditions becomes more and more important. Pressure measurement is included in all sorts of weather stations, environmental surveillance instruments and off-shore monitoring systems.