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  • Pressure sensors

    A range of small and robust absolute pressure sensors are offered. The whole product range utilizes Sensonor's anodic wafer bonding technology with electrical crossings buried under an epitaxial layer. This guarantees unbeaten performance for demanding applications requiring high life time stability and good media compatibility. Less than 0.1ppm failure rate for several 100 million sensors shipped for automotive applications is our proof.

     

    The sensors are offered as dies in tray packs, as single wafers and wafer lots, in non-compensated SOIC packaged versions and in fully compensated SOIC packaged digital versions. This will give our customers the choice to integrate this unique technology at the right level in the value chain.

     

    The SP300 range brings the art of pressure sensing to a new dimension. The sensor contains an embedded microcontroller that can be used to run application specific programs. Additionally and complementary an LF wireless actuation interface is included capable for configuration and functional commands. This unique combination of embedded microcontroller and LF-input makes the sensor capable as a platform for standalone system operation in remote and inaccessible locations.

     

    An on-chip integrated (115g range) accelerometer is available for all Sensonor's pressure sensor classes. Only your imagination will determine the use of this unique feature. A typical application is for wake-up in battery powered systems reacting on movement, vibrations or shock.

Key features

  • Superior reliability and robustness over long lifetime
  • Excellent media compatibility in harsh environments
  • High overload capability in tough applications
  • Superior long term stability
  • Packaged and non-packaged versions
  • Digital compensated and non-compensated versions
  • Embedded microcontroller versions
  • Temperature sensor included
  • Optional pressure tube connection
  • Optional integrated accelerometer
  • Intelligent low power for battery operation

Typical application areas

  • Absolute, Barometric and Gage pressure sensing

    Absolute Pressure Sensors and Vacuum Pressure Sensors: The reference for absolute pressure sensors is vacuum contained in a cavity and the output is zero at vacuum. All Sensonor's sensors are absolute by design. Low range absolute pressure sensors can be used with good result for vacuum measurements in the "low vacuum" domain (absolute pressure larger than 30mbar).

     

    Barometric Pressure Sensors: These are absolute pressure sensors with a limited range. Sensonor specifies the barometric range from 0.80 to 1.20 bar. A limited range offers more resolution and accuracy.

     

    Gage pressure sensors: With gage sensors, pressure readings are referenced to the atmosphere and the output is zero at atmospheric pressure. Since all Sensonor's pressure sensors are absolute by design they will not measure gage pressure very accurately; however, for higher pressure ranges the inaccuracy in the measurement may be insignificant even using an absolute sensor after correction for nominal atmospheric pressure.

  • Pressure sensors used for indirect assessment of other quantities

    Due to the easy and fundamental aspect of pressure sensing, it is often found as the method to assess quite different quantities. Examples are use for weight and force measurement through the relation Force(F) = Pressure(p) x Area(A) and for flow measurements using the Venturi effect.

  • Aerospace

    All planes and helicopters need many pressure sensors. The use of MEMS precision technology can make such systems cheaper, smaller, lighter and more reliable. Examples of use are in Altimeters, Air Data Computers (ADS and ADAHRS), in aircraft cabin and environmental control systems, in hydraulic systems and in engine control systems.

  • Automotive

    Modern cars can include more than 100 sensors and many of these use MEMS technology. For some applications unique properties in relation to robustness and environmental capability may be required. Examples can be found within engine control, including manifold and barometric pressure, within level metering, within water and climate control, within fuel line control, within brake controls, within gear box control, within passenger detection and weight distribution and for tire pressure monitoring.

  • Domestic and house appliances

    The home is becoming an electronic control room. Every appliance, environmental and utility function in the professional building or the private home includes one or more control functions. Pressure sensors are needed for measurements of gases/air or liquids/water. Examples are: Air conditioning, water metering, gas metering, vacuum cleaners, dishwashers, washing machines, sewage and waste water.

  • Medical and biomedical equipment

    Among applications for pressure sensors used in medicine and for health monitoring is blood pressure measurement, abdominal pressure measurement and plantar pressure (foot pressure). Pressure sensors are also often used in medical equipment based on hydraulic controls and for indirect weight and flow measurements.

  • Leisure and sports

    Electronics have for long been introduced into every sector of leisure and sports equipment. Examples are altimeters often included with arm wrist watches, dept meters for scuba diving, pulse meters for training monitors and for wrist mount and indirect use as force detectors, used in switches on training equipment and for foot pressure measurement.

  • Meteorology and environmental monitoring

    The forecasting and monitoring of weather and environmental conditions becomes more and more important. Pressure measurement is included in all sorts of weather stations, environmental surveillance instruments and off-shore monitoring systems.